|
|
 |
 |
Proforma 300: |
|
 |
|
|
 |
The Proforma
300 is based on MTI Instruments' proprietary capacitance technology and can be used on all wafer materials including:
-
Silicon
-
Gallium-Arsenide
-
Indium Phosphide
-
Germanium
... without recalibrating or electrically grounding the wafer!
-
Fast, Accurate, and Reliable, the Proforma 300 measures wafers up to 300
mm in diameter for both thickness and total thickness variation (TTV)
-
Portable and Easy to Set Up, the Proforma 300 provides the user precise
non-contact measurements at critical points throughout the wafer manufacturing
process.
Thickness and TTV values are obtained by placing the wafer between
the non-contact capacitance probes. The Teflon coated
wafer stage allows for easy, non-abrasive positioning of the wafer,
while removable locating pins can be utilized for precise center
thickness measurements. Thickness and TTV values are indicated
on the high resolution LCD display.
|
Menu-driven for Fast, Easy Setup. |
|
Proprietary Push-PullTM Probe Technology. |
|
High-resolution LCD Display. |
|
On-board Microprocessor for Accurate, Repeatable Measurements. |
|
Bubble Level. |
|
Adjustable Stage for Precise Leveling. |
|
Teflon Wafer Stage for Easy, Non-abrasive Positioning. |
|
|
|
|
Thickness. |
|
Total Thickness Variation (TTV). |
|
Continuous and 5-point Measurement. |
|
|
|
 |
Measures Different Materials, such as Si, Ge, InP, and GaAs,
without
Recalibration. |
 |
No Need to Electrically Ground the Wafer. |
 |
Easy to Set up and Operate - making it ideal for Production
and Statistical
Process Control (SPC). |
 |
Provides High Performance at Low Cost. |
 |
Can be Customized for Maximum Sensing Range or
Maximum Stand-off from
Target. |
|
|
|
 |
MTI Instruments' Proprietary Capacitance Circuitry for
Outstanding Accuracy
and Dependability. |
 |
Non-contact Measurements. |
 |
50- 300 mm Diameter Wafer Range. |
 |
+/-0.25 µm Accuracy. |
 |
RS-232 Output Port to PC. |
 |
Parallel Port for Printer |
|
|
|
Specifications:
|
Wafer size
|
50-300 mm (2-12") |
|
Wafer thickness range |
100
mm-1
mm (0.004" - 0.040") |
|
Accuracy |
+/- 0.25
mm
(+/-10 min) |
|
Resolution |
0.125
mm
(5 min) |
|
Repeatability
|
+/- 0.25
mm (+/-10 min)
|
|
Linearity |
+/- 0.25
mm
(+/-10 min) |
|
Response Time |
5 ms |
|
Stability |
0.125
mm/
ºC (5
min/
ºC) |
|
Dimensions |
19" L x 13" W x 11" H |
|
Weight
|
13.5 kg (30 lb) |
|
Power requirements |
100/230 Vac; 50/60 Hz; 40
W |
|
Operating environment
|
15-27 ºC (60-80
ºF) |
|
Data output |
LCD display; RS-232 port |
|
Acceptable printers |
Dot matrix; Laser, Inkjet |
| Optional GPIB interface |
|
| Optional Ethernet interface
|
|
|
|
Toll
Free: (888) 738-0039
E-mail: a-kast@on.aibn.com
Copyright © 2000 A-KAST
Measurements & Control Limited
                  |
|